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Spin coater JSI-402D,603D½Ã¸®Áî

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JSI-402D

JSI-603D

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¥õ10¡­100 mm dia ÀÌÇÏ

10¡­150 mm dia ÀÌÇÏ

(100 gÀÌÇÏ)

(100 gÀÌÇÏ)

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¥õ200 mm¡¤½ºÅÙ·¹½º

¥õ300 mm¡¤½ºÅÙ·¹½º

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SS

SS

300W*400D*270Hmm

350W*450D*270Hmm

½ºÇÉ ¸ðÅÍ

AC¼­º¸¸ðÅÍ

same

ȸÀü¼ö

100¡­5000rpm

same

 

ȸÀü Ç¥½Ã

µðÁöÅ» Ç¥½Ã

same

ȸÀüstep

10´Ü(µðÁöÅ»), 10 Recipe

same

1 sec¡­999sec

Àü¿ø

AC220V

same

CDA or N2

¾øÀ½

¾ø½¿

Áø°ø

200 Torr ÀÌ»ó

same

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1 °èÅë ¼öµ¿ ½ºÀ®½Ä

1 °èÅë ¼öµ¿ ½ºÀ®½Ä

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