½ºÇÉÄÚÅÍ(Spincoater) ¸¶½ºÅ©¾ó¶óÀ̳Ê(Mask
Aligner) ÆÄ¸±·»ÄÚÅÍ(Pparylene
Coater)


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Spin coater NS£301 ½Ã¸®Áî |
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±âÁ¾ |
¸Å´º¾ó ½ºÇÇ³Ê |
¸Å´º¾ó ½ºÇÉÄÚÅÍ |
|
ǰ ¸í |
NS£301 |
NS£301D |
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½Ã·á »çÀÌÁî |
¥õ10¡160 mmÀÌÇÏ |
same |
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(100 gÀÌÇÏ) |
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ÄÅ Áö¸§ ÀçÁú |
¥õ300 mm¡¤½ºÅÙ·¹½º ¶Ç´Â NPP |
same |
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º»Ã¼ ÀçÁú¡¤Ä¡¼ö |
SS |
SS |
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350W*450D*270Hmm |
430W*450D*270Hmm |
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½ºÇÉ ¸ðÅÍ |
½ºÇǵå ÄÜÆ®·Ñ ¸ðÅÍ |
same |
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ȸÀü¼ö |
250¡6000rpm |
same |
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(º¼·ý ¼³Á¤) |
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ȸÀü Ç¥½Ã |
¾Æ³¯·Î±× |
same |
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(Àü¾Ð Ç¥½Ã ´ëÀÀ) |
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ȸÀü´Ü¼ö |
3´Ü(¾Æ³¯·Î±× ŸÀ̸Ó) |
same |
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0.2 sec¡500hrs |
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Àü¿ø |
AC220V |
same |
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CDA or N2 |
¾ø½¿ |
0.2 Mpa ÀÌ»ó |
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Áø°ø |
200 Torr ÀÌ»ó |
same |
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ÅäÃâ ³ëÁñ |
¾øÀ½ |
1 °èÅë ¼öµ¿ ½ºÀ®½Ä |
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¿É¼Ç |
½Ã·á´ë ±âº» 1°³ |
½Ã·á´ë ±âº» 1°³ |
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Áø°ø ÆßÇÁ ±âº» |
Áø°ø ÆßÇÁ ±âº» |
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¾ÈÀü Ä¿¹ö |
¾ÈÀü Ä¿¹ö |
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Ÿ |
¼¾ÅÍ ¸µ Ä¡±¸ |
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½ÇÁ¦ ¿Ü°üÀº »çÁø°ú Â÷À̳¯¼ö ÀÖ½¿
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¾È¾ç½Ã µ¿¾È±¸ È£°è 555-9
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±¹Á¦ À¯Åë´ÜÁö 17µ¿ 127È£
Tel
: (031) 479-4211/2, Fax : (031) 479-4213
1992-2001
,Jsi.co. All rights reserved
Contact us : jsi@jsits.com
½ºÇÉÄÚÅÍ/Spincoater ½ºÇÉÄÚÅÍ/Spincoater
½ºÇÉÄÚÅÍ/Spincoater ½ºÇÉÄÚÅÍ/Spincoater
½ºÇÉÄÚÅÍ/Spincoater ½ºÇÉÄÚÅÍ/Spincoater
½ºÇÉÄÚÅÍ/Spincoater